- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/203 - Deposition of semiconductor materials on a substrate, e.g. epitaxial growth using physical deposition, e.g. vacuum deposition, sputtering
Patent holdings for IPC class H01L 21/203
Total number of patents in this class: 599
10-year publication summary
|
34
|
43
|
28
|
41
|
31
|
36
|
23
|
16
|
15
|
5
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 16587 |
95 |
| Showa Denko K.K. | 2539 |
19 |
| Canon Anelva Corporation | 676 |
16 |
| ULVAC, Inc. | 1448 |
13 |
| Sumitomo Electric Industries, Ltd. | 14131 |
11 |
| Idemitsu Kosan Co., Ltd. | 3995 |
10 |
| Intel Corporation | 45621 |
9 |
| Japan Display Inc. | 6202 |
8 |
| Tosoh Corporation | 1127 |
8 |
| Honeywell International Inc. | 13799 |
7 |
| Semiconductor Energy Laboratory Co., Ltd. | 10902 |
7 |
| Tokyo Electron Limited | 11599 |
7 |
| Lam Research Corporation | 4775 |
7 |
| LG Innotek Co., Ltd. | 6758 |
5 |
| NGK Insulators, Ltd. | 4589 |
5 |
| Agency for Science, Technology and Research | 3512 |
5 |
| National Institute of Information and Communications Technology | 594 |
5 |
| National University Corporation Nagoya University | 921 |
5 |
| The Research Foundation for The State University of New York | 1468 |
5 |
| Soitec | 892 |
5 |
| Other owners | 347 |